The MEMS smoke gas sensor is composed of a Si-based micro-hot plate based on MEMS technology and a metal oxide semiconductor gas sensing material with low conductivity in clean air. When the detected gas exists in the ambient air, the conductivity of the sensor changes. The higher the concentration of the gas, the higher the conductivity of the sensor. The change in conductivity can be converted into an output signal corresponding to the gas concentration using a simple circuit.

MEMS combustible gas sensor is composed of Si-based micro-hot plate made of MEMS technology and metal oxide semiconductor material with low conductivity in clean air. When the detected gas is present in the ambient air, the conductivity of the sensor changes. The higher the concentration of this gas, the higher the conductivity of the sensor. The change in conductivity can be converted into an output signal corresponding to the gas concentration using a simple circuit.